Solid State Sensors > Airflow Sensors > Amplified Airflow Sensors > F4H Compact Digital Mass Flow Controller

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F4H Compact Digital Mass Flow Controller

This device is a high-performance compact digital mass flow controller with advanced functions for equipments. It features high speed and wide range flow rate control and 1%SP accuracy. With isolation of the power supply from the signal circuit, power supply noise can’t affect analog signals. It realizes the high noise tolerance.

Compact design

The model F4H is 50% smaller than our conventional model.

 

Effectively utilize digital communication

With model F4H’s communication much information useful for fault diagnosis can be uploaded.
Also with a smart device gateway(model NX-SVG),the model F4H can communicate with major programmable logic controller.

 

 

High noise tolerance

The signal circuit is isolated from the power supply.
Thanks to this feature, noise from power wiring has no effect on signals.

 

Reduction in overall cost

By switching from an analog to a digital connection with PLC, the analog I/O module can be eliminated.

 

Application

PVD(Physical Vapor Deposition)

MFC supply argon gas to chamber to generate plasma.

 

F4H Brochure

Available Models
F4H00026SN20N0000
F4H00026SN30N00D0
F4H00026SS20S0000
F4H00026SS30S00D0
F4H00026TN20N0000
F4H00026TN30N00D0
F4H00026TS20S0000
F4H00026TS30S00D0
F4H00026UN20N0000
F4H00026UN30N00D0
F4H00026US20S0000
F4H00026US30S00D0
F4H00026VN20N0000
F4H00026VN30N00D0
F4H00026VS20S0000
F4H00026VS30S00D0
F4H00056SN30N00D0
F4H00056SS30S00D0
F4H00056TN30N00D0
F4H00056TS30S00D0
F4H00056UN30N00D0
F4H00056US30S00D0
F4H00056VN30N00D0
F4H00056VS30S00D0
F4H00206SN30N00D0
F4H00206SS30S00D0
F4H00206TN30N00D0
F4H00206TS30S00D0
F4H00206UN30N00D0
F4H00206US30S00D0
F4H00206VN30N00D0
F4H00206VS30S00D0
F4H90506SN30N00D0
F4H90506SS30S00D0
F4H90506TN30N00D0
F4H90506TS30S00D0
F4H90506UN30N00D0
F4H90506US30S00D0
F4H90506VN30N00D0
F4H90506VS30S00D0
F4H92006SN20N0000
F4H92006SN30N00D0
F4H92006SS20S0000
F4H92006SS30S00D0
F4H92006TN20N0000
F4H92006TN30N00D0
F4H92006TS20S0000
F4H92006TS30S00D0
F4H92006UN20N0000
F4H92006UN30N00D0
F4H92006US20S0000
F4H92006US30S00D0
F4H92006VN20N0000
F4H92006VN30N00D0
F4H92006VS20S0000
F4H92006VS30S00D0
F4H95006SN20N0000
F4H95006SN30N00D0
F4H95006SS20S0000
F4H95006SS30S00D0
F4H95006TN20N0000
F4H95006TN30N0000
F4H95006TN30N00D0
F4H95006TS20S0000
F4H95006TS30S0000
F4H95006TS30S00D0
F4H95006UN20N0000
F4H95006UN30N00D0
F4H95006US20S0000
F4H95006US30S00D0
F4H95006VN20N0000
F4H95006VN30N00D0
F4H95006VS20S0000
F4H95006VS30S00D0
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