Sensorwell

F4H Compact Digital Mass Flow Controller

This device is a high-performance compact digital mass flow controller with advanced functions for equipments. It features high speed and wide range flow rate control and 1%SP accuracy. With isolation of the power supply from the signal circuit, power supply noise can’t affect analog signals. It realizes the high noise tolerance.

Compact design

The model F4H is 50% smaller than our conventional model.

Effectively utilize digital communication

With model F4H’s communication much information useful for fault diagnosis can be uploaded.
Also with a smart device gateway(model NX-SVG),the model F4H can communicate with major programmable logic controller.

High noise tolerance

The signal circuit is isolated from the power supply.
Thanks to this feature, noise from power wiring has no effect on signals.

Reduction in overall cost

By switching from an analog to a digital connection with PLC, the analog I/O module can be eliminated.

Application

PVD(Physical Vapor Deposition)

MFC supply argon gas to chamber to generate plasma.